Photolithography: Basic Function

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BJ

2021年1月19日

As micro and nanotechnology student, I understand each and every videos. The information given here is highly understanding, precise, experimental overview all up to the mark. Highly recommended

M

2020年5月27日

In my undergrad I have learned about fabrication in the VLSI course, now I have got the gest of cooking. thank you for such a course, hope I will get some further help from rtnn.org & RTNN team.

從本節課中

Nanofabrication: Patterning and Self-Assembly

In this module, we will investigate 5 different methods used in nanotechnology for patterning. You will be able to explain the basic processes of photolithography, e-beam lithography, ion beam lithography, hot embossing, and self-assembly.

教學方

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    Nan M. Jokerst

    J. A. Jones Professor of Electrical and Computer Engineering

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    Carrie Donley

    Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)

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    James Cahoon

    Assistant Professor

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    Jacob Jones

    Professor

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