SIMS: Basic Principles and Components

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來自 National Research Nuclear University MEPhI 的課程
Methods of Surface Analysis
11 個評分
National Research Nuclear University MEPhI
11 個評分
從本節課中
Particle Diagnostics. Secondary Ion Mass Spectrometry (SIMS)
This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In SIMS sputtering yield is being analyzed, giving great information on surface composition.

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  • Sadovsky Yaroslav
    Sadovsky Yaroslav
    Assistant
    Department of Plasma Physics

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